TITLE

Ultrasonic force microscopy for nanometer resolution subsurface imaging

AUTHOR(S)
Yamanaka, Kazushi; Ogiso, Hisato; Kolosov, Oleg
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/10/1994, Vol. 64 Issue 2, p178
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a method for nanometer resolution subsurface imaging with ultrasonic force microscopy. Impact of low-frequency lateral vibration on subsurface feature imaging; Discrimination of subsurface features by regulating vibration force direction; Visibility of stringlike features in the lateral force modulation image.
ACCESSION #
4289536

 

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