Deflection of ions due to electric field perturbation in electron cyclotron resonance discharges

Ardehali, M.
January 1994
Applied Physics Letters;1/10/1994, Vol. 64 Issue 2, p169
Academic Journal
Examines the transport of ions across the sheath of electron cyclotron resonance discharges using Monte Carlo methods. Distortion of the electric field near the wafer surface by the trench geometric shape; Association of the ion deflection degree with the trench depth; Effect of surface topography on ion trajectories.


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