Integrated nanofabrication with the scanning electron microscope and scanning tunneling microscope

Rosolen, G.C.; Hoole, A.C.F.; Welland, M.E.; Broers, A.N.
October 1993
Applied Physics Letters;10/25/1993, Vol. 63 Issue 17, p2435
Academic Journal
Investigates an integrated nanofabrication using scanning electron microscopy (SEM) and scanning tunneling microscopy (STM). Advantages of electron beam lithography; Nanofabrication techniques using STM; Uses of the combined SEM and STM instruments.


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