TITLE

Integrated nanofabrication with the scanning electron microscope and scanning tunneling microscope

AUTHOR(S)
Rosolen, G.C.; Hoole, A.C.F.; Welland, M.E.; Broers, A.N.
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/25/1993, Vol. 63 Issue 17, p2435
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates an integrated nanofabrication using scanning electron microscopy (SEM) and scanning tunneling microscopy (STM). Advantages of electron beam lithography; Nanofabrication techniques using STM; Uses of the combined SEM and STM instruments.
ACCESSION #
4289517

 

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