Di- and Tricarboxylic-acid-based etches for processing high temperature superconducting thin films

Ginley, D.S.; Ashby, C.I.H.; Plut, T.A.; Urea, D.; Siegal, M.P.; Martens, J.S.
October 1993
Applied Physics Letters;10/25/1993, Vol. 63 Issue 17, p2429
Academic Journal
Presents a class of chelating etches for processing yttrium-barium-copper and thallium-barium-calcium-cobalt high temperature superconductors. Implications for the fabrication of high-frequency devices; Increase in microwave surface resistance; Applications of the etch technology.


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