Nitrogen radical doping during metalorganic vapor phase epitaxy of ZnSe

Morimoto, Keizo; Fujino, Takahiro
October 1993
Applied Physics Letters;10/25/1993, Vol. 63 Issue 17, p2384
Academic Journal
Investigates nitrogen radical doping during metalorganic vapor phase epitaxy of zinc selenide (ZnSe) layers. Effect of using active nitrogen generated by radio-frequency plasma discharge; Source materials used in the study; Cathodoluminescence spectra of the material; Characteristics of nitrogen-doped ZnSe layers.


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