Low-temperature in situ preparation of ferroelectric Pb(Zr[sub 0.55]Ti[sub 0.45])O[sub 3] thin

Xingjiao Li; Jianshe Liu; Yike Zeng; Junwen Liang
October 1993
Applied Physics Letters;10/25/1993, Vol. 63 Issue 17, p2345
Academic Journal
Investigates the preparation of lead-zirconate-titanate thin films on platinum-coated (111)silicon by reactive sputtering technique. Reaction products identified by x-ray diffraction; Diffraction patterns of the films; Remanent polarization of the ferroelectric hysteresis loops.


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