Simultaneous synthesis of well-separated buried and surface silicides using a single ion

Wu, M.F.; De Wachter, J.; Hendrickx, P.; Van Bavel, A.M.; Pattyn, H.; Langouche, G.; Vanhellemont, J.; Bender, H.; Maenhoudt, M.; Bruynseraede, Y.
July 1993
Applied Physics Letters;7/26/1993, Vol. 63 Issue 4, p542
Academic Journal
Examines the synthesis of well-separated buried and surface silicide layers using single ion implantation. Ni distribution in silicide; Use of Auger electron spectroscopy and transmission electron microscopy; Dependence of backscattering spectra on implantation sequence.


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