TITLE

Pulsed laser deposition of epitaxial silicon/h-Pr[sub 2]O[sub 3]/silicon heterostructures

AUTHOR(S)
Tarsa, E.J.; Speck, J.S.; Robinson, McD.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/26/1993, Vol. 63 Issue 4, p539
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the epitaxial growth of silicon/praseodymium oxide/silicon heterostructure on (111) oriented silicon substrate using pulsed laser deposition. Formation of hexagonal praseodymium oxide film; Structural analysis of oxide and semiconductor layer using reflection high energy electron diffraction; Use of transmission electron microscopy.
ACCESSION #
4289465

 

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