Multiple dislocation loops in linearly graded In[sub x]Ga[sub 1-x]As (0...X...0.53) on GaAs and

Chang, J.C.P.; Chin, T.P.; Tu, C.W.; Kavanagh, K.L.
July 1993
Applied Physics Letters;7/26/1993, Vol. 63 Issue 4, p500
Academic Journal
Observes the appearance of multiple dislocation loops in lattice mismatched III-V semiconductor systems. Use of transmission electron microscopy; Growth of the sample by gas-source molecular beam epitaxy; Influence of threading dislocation density on the loop appearance; Relation between the dislocation loops and the composition step size.


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