Laser-plasma deposition of diamond phase at low temperatures

Seth, Jayshree; Padiyath, R.; Rasmussen, D.H.; Babu, S.V.
July 1993
Applied Physics Letters;7/26/1993, Vol. 63 Issue 4, p473
Academic Journal
Describes a low-temperature technique facilitating diamond crystallites nucleation on silicon substrate by excimer laser ablation of graphite in an argon radiofrequency plasma ambient. Effect of ion-induced sputtering on silicon; Structural analysis through transmission electron diffraction method; Removal of nondiamond configuration by ion bombardment.


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