TITLE

Accurate monocrystal miscut angle determination by x-ray diffraction on a wedge

AUTHOR(S)
Gailhanou, M.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/26/1993, Vol. 63 Issue 4, p458
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops a method for the determination of semiconductor monocrystal surface orientation with respect to the crystallographic planes. Basis of the methodology; Results of the x-ray diffraction on a cleaved wedge of monocrystal; Sensitivity of the angular difference between the produced diffraction peaks.
ACCESSION #
4289438

 

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