Accurate monocrystal miscut angle determination by x-ray diffraction on a wedge

Gailhanou, M.
July 1993
Applied Physics Letters;7/26/1993, Vol. 63 Issue 4, p458
Academic Journal
Develops a method for the determination of semiconductor monocrystal surface orientation with respect to the crystallographic planes. Basis of the methodology; Results of the x-ray diffraction on a cleaved wedge of monocrystal; Sensitivity of the angular difference between the produced diffraction peaks.


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