YBa[sub 2]Cu[sub 3]O[sub 7-y] microbridges on Y[sub 2]O[sub 3]/yttria-stabilized

Hontsu, S.; Mukai, N.; Ishii, J.; Kawai, T.; Kawai, S.
November 1992
Applied Physics Letters;11/30/1992, Vol. 61 Issue 22, p2709
Academic Journal
Presents the fabrication of YBa[sub 2]Cu[sub 3]O[sub 7-y] (YBCO) microbridges on a silicon dioxide/Si substrate using Y[sub 2]O[sub 3]/yttria-stabilized zirconia buffer layer. Application of electron beam lithography and dry etching; Deposition of the YBCO layer by laser ablation; Characteristics of the YBCO bridge.


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