Free-standing microstructures of YBa[sub 2]Cu[sub 3]O[sub 7-delta]: A high-temperature

Lee, L.P.; Burns, M.J.; Char, K.
November 1992
Applied Physics Letters;11/30/1992, Vol. 61 Issue 22, p2706
Academic Journal
Describes the fabrication of a free-standing YBa[sub 2]Cu[sub 3]O[sub 7-delta] air bridge for applications of microstructures and microcircuits integration. Use of a sacrificial dielectric layer; Application of photolithographic processing, ion-beam and selective dry etching; Determination of bridge layer step coverage.


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