TITLE

Anomalous intense ultraviolet emission bands in the radio-frequency glow discharges of

AUTHOR(S)
Yagi, Shigeru; Takahashi, Noriyoshi
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/30/1992, Vol. 61 Issue 22, p2677
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Observes intense ultraviolet emission bands in the radio-frequency glow discharges of GeH[sub 4]-fluorocarbon-H[sub 2] mixtures. Range of the band wavelength; Agreement of the observed bands with the weak emission system of germanium difluoride; Application of plasma-enhanced chemical vapor deposition.
ACCESSION #
4289409

 

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