TITLE

Preparation of cubic boron nitride films by low pressure inductively coupled plasma enhanced

AUTHOR(S)
Ichiki, Takanori; Yoshida, Toyonobu
PUB. DATE
February 1994
SOURCE
Applied Physics Letters;2/14/1994, Vol. 64 Issue 7, p851
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the synthesis of cubic boron nitride (c-BN) films on silicon substrate by low pressure inductively coupled plasma-enhanced chemical vapor deposition. Deposition of polycrystalline c-BN film by ion bombardment; Use of infrared absorption spectroscopy and electron diffraction patterns; Determination of optimum sheath potential for c-BN growth.
ACCESSION #
4284449

 

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