Oxygen control of dc-sputtered Bi[sub 2]Sr[sub 2]Ca[sub 1]Cu[sub 2]O[sub 8+delta] films

Auge, Jurgen; Rudiger, Ulrich
January 1994
Applied Physics Letters;1/17/1994, Vol. 64 Issue 3, p378
Academic Journal
Examines the oxygen control of dc-sputtered bismuth-based thin films. Use of planar dc-sputtering method in preparing critical temperature thin films on SrTiO[sub 3] substrates; Determination of oxygen content by x-ray measurements of the c-axis lattice parameter; Dependence of oxygen flow optimum value on target diameter and system base pressure.


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