Thermal budget consideration in rapid isothermal processing

Thakur, R.P.S.; Singh, R.
January 1994
Applied Physics Letters;1/17/1994, Vol. 64 Issue 3, p327
Academic Journal
Examines the technique in isothermal processing based on incoherent radiation. Use of radiation as source of thermal and optical energy; Dependence of device fabrication on heating and cooling rates; Effects of optimized heating and cooling rates on thermal stress and warpage; Application of low-pressure chemical vapor deposition in warpage study.


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