TITLE

Thermal budget consideration in rapid isothermal processing

AUTHOR(S)
Thakur, R.P.S.; Singh, R.
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/17/1994, Vol. 64 Issue 3, p327
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the technique in isothermal processing based on incoherent radiation. Use of radiation as source of thermal and optical energy; Dependence of device fabrication on heating and cooling rates; Effects of optimized heating and cooling rates on thermal stress and warpage; Application of low-pressure chemical vapor deposition in warpage study.
ACCESSION #
4284409

 

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