TITLE

AlGaAs/GaAs charge injection transistor/negative resistance field-effect transistor fabricated

AUTHOR(S)
Jiun-Tsuen Lai; Ya-min Lee, Joseph
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/17/1994, Vol. 64 Issue 3, p306
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication of AlGaAs/GaAs charge injection transistor/negative resistance field-effect transistor devices. Application of Pd/Ge ohmic contacts in the process; Use of electronic beam evaporation in Pd and Ge deposition; Effect of thermal annealing of contact metal layers on ohmic contact and specific contact resistivity.
ACCESSION #
4284402

 

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