AlGaAs/GaAs charge injection transistor/negative resistance field-effect transistor fabricated

Jiun-Tsuen Lai; Ya-min Lee, Joseph
January 1994
Applied Physics Letters;1/17/1994, Vol. 64 Issue 3, p306
Academic Journal
Examines the fabrication of AlGaAs/GaAs charge injection transistor/negative resistance field-effect transistor devices. Application of Pd/Ge ohmic contacts in the process; Use of electronic beam evaporation in Pd and Ge deposition; Effect of thermal annealing of contact metal layers on ohmic contact and specific contact resistivity.


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