TITLE

Fluorine ion etching of lead zirconate-titanate thin films

AUTHOR(S)
Lau, W.M.; Bello, I.
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/17/1994, Vol. 64 Issue 3, p300
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the etching reactions of lead zirconate-titanate thin films with fluorine ions. Application of x-ray photoelectron spectroscopy in the process; Use of low energy ion in ion bombardment; Determination of etch yield through ion bombardment and monolayer doses; Depiction of clear lead surface enrichment due to bombardment.
ACCESSION #
4284400

 

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