Lattice relaxation of nanostructured semiconductor pillars observed by high-resolution x-ray

van der Sluis, Paul; Verheijen, Martin J.
June 1994
Applied Physics Letters;6/27/1994, Vol. 64 Issue 26, p3605
Academic Journal
Investigates the lattice relaxation of nanostructures semiconductor pillars by high-resolution x-ray diffraction. Determination of the lattice parameters and the shape of the pillars; Occurrence of the lattice relaxation in the small pillars; Details on the Fourier transformation of the shape of the silicon and Si[sub 1-x]Ge[sub x].


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