Phosphorus-induced positive charge in native oxide of silicon wafers

Shimizu, Hirofumi; Munakata, Chusuke
June 1994
Applied Physics Letters;6/27/1994, Vol. 64 Issue 26, p3598
Academic Journal
Examines the phosphorus (P)-induced positive charge in native oxide of silicon wafers. Factor contributing to the appearance of the negative charge in the native oxide; Purpose of developing the scanning photon microscope; Rationale for the action of P ion as a positive charge.


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