TITLE

Structural study of a Si(001) grating surface by white beam x-ray Laue photography

AUTHOR(S)
Qun Shen; Weselak, B.
PUB. DATE
June 1994
SOURCE
Applied Physics Letters;6/27/1994, Vol. 64 Issue 26, p3554
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a structural study of a silicon(001) grating surface by white beam x-ray Laue photography. Characterization of single crystal surface gratings; Factors affecting x-ray diffraction; Techniques used to study periodic structures on semiconductor surfaces.
ACCESSION #
4278284

 

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