Detection of deeply buried thin oxide layer by means of Auger depth profiling

Sulyok, A.; Menyhard, M.
July 1997
Review of Scientific Instruments;Jul97, Vol. 68 Issue 7, p2847
Academic Journal
Focuses on the detection of deeply buried thin oxide layer by means of Auger depth profiling device. Experimental configuration of the system; Detection of a thin oxide layer buried about a 180 nanometer thick layer; Achievement of superior depth resolution; Auger peak intensities.


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