TITLE

Detection of deeply buried thin oxide layer by means of Auger depth profiling

AUTHOR(S)
Sulyok, A.; Menyhard, M.
PUB. DATE
July 1997
SOURCE
Review of Scientific Instruments;Jul97, Vol. 68 Issue 7, p2847
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Focuses on the detection of deeply buried thin oxide layer by means of Auger depth profiling device. Experimental configuration of the system; Detection of a thin oxide layer buried about a 180 nanometer thick layer; Achievement of superior depth resolution; Auger peak intensities.
ACCESSION #
4272762

 

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