Mechanisms of epitaxial CoSi[sub 2] formation in the multilayer Co/Ti-Si(100) system

Feng Hong; Rozgonyi, George A.
April 1994
Applied Physics Letters;4/25/1994, Vol. 64 Issue 17, p2241
Academic Journal
Describes the mechanism of epitaxial CoSi[sub 2] formation in the multilayer cobalt/titanium-silicon(100) structures. Factors attributed to the formation of CoSi[sub 2]; Function of the upper cobalt and titanium layers; Implication of the capping layer effect for stability of CoSi[sub 100] epitaxial growth.


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