TITLE

Monolayer analysis in Rutherford backscattering spectroscopy

AUTHOR(S)
Kimura, Kenji; Ohshima, Kazuomi
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/25/1994, Vol. 64 Issue 17, p2232
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the monolayer resolution in Rutherford backscattering spectroscopy. Resolution of ions scattered from successive atomic layers; Importance of high energy resolution and grazing angle technique in monolayer analysis; Energy spectra of helium ions.
ACCESSION #
4272562

 

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