Monolayer analysis in Rutherford backscattering spectroscopy

Kimura, Kenji; Ohshima, Kazuomi
April 1994
Applied Physics Letters;4/25/1994, Vol. 64 Issue 17, p2232
Academic Journal
Demonstrates the monolayer resolution in Rutherford backscattering spectroscopy. Resolution of ions scattered from successive atomic layers; Importance of high energy resolution and grazing angle technique in monolayer analysis; Energy spectra of helium ions.


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