TITLE

Randomly oriented Angstrom-scale microroughness at the Si(100)/SiO[sub 2] interface probed by

AUTHOR(S)
Dadap, J.I.; Doris, B.
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/18/1994, Vol. 64 Issue 16, p2139
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the microroughness at silicon/silicon dioxide interface through optical second harmonic generation. Use of titanium:sapphire laser to generate second harmonic (SH) signals; Details on anisotropic oscillation amplitude of the etched surface; Effects of interfacial microroughness on second harmonic generation.
ACCESSION #
4272534

 

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