TITLE

Nanometer scale patterning of silicon (100) surfaces by an atomic force microscope operating in air

AUTHOR(S)
Liming Tsau; Dawen Wang
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/18/1994, Vol. 64 Issue 16, p2133
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the nanometer scale patterning of silicon surfaces by atomic force microscope operating in air. Mechanism of field-enhanced oxidation on silicon surfaces with protein oxide; Relevance of electric field to surface oxidation; Process for controlling the writing depth of oxidation.
ACCESSION #
4272532

 

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