In situ time-resolved monitoring of PH[sub 3] induced exchange reactions on GaAs under

Jonsson, J.; Reinhardt, F.
April 1994
Applied Physics Letters;4/11/1994, Vol. 64 Issue 15, p1998
Academic Journal
Examines the reaction of phosphine (PH[sub 3]) with arsine-terminated gallium arsenide surface at normal growth temperatures and pressures. Use of reflectance anisotropy spectroscopy in monitoring group-V atom exchange; Replacement of the As-terminated GaAs surface by a P-terminated structure; Temperature and pressure dependence of the AS by P exchange.


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