Fabrication of Si nanostructures with an atomic force microscope

Snow, E.S.; Campbell, P.M.
April 1994
Applied Physics Letters;4/11/1994, Vol. 64 Issue 15, p1932
Academic Journal
Presents a method for fabricating silicon nanostructures with an air-operated atomic force microscope (AFM). Use of an electrically conducting AFM tip to oxidize silicon surface; Role of the oxide as a mask for pattern transfer into the substrate; Dependence of the initial oxide growth rate on the applied voltage.


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