TITLE

Pulsed excimer laser ablation of (Pb,La)TiO[sub 3] thin films for dynamic random access memory

AUTHOR(S)
Mohan Rao, G.; Krupanidhi, S.B.
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1591
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the deposition of polycrystalline (Pb,La)titanium trioxide thin films by laser ablation on silicon and platinum coated substrates. Dependence of the crystallinity of the films; Appearance of dielectric behavior in terms of varying dielectric permittivity; Sensitivity of the films towards the processing conditions.
ACCESSION #
4272451

 

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