TITLE

Scaling for ferroelectric properties in La-Sr-Co-O/Pb-La-Zr-Ti-O/La-Sr-Co-O capacitors

AUTHOR(S)
Ramesh, R.; Dutta, B.
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1588
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the scaling of ferroelectric properties with the capacitor size using epitaxial heterostructures grown on silicon. Fabrication of the capacitor; Characteristics of the capacitors; Exploration of the effect of full-wafer processing; Analysis of the imprint characteristics of the 4-micro meter-diam capacitor arrays.
ACCESSION #
4272450

 

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