Scaling for ferroelectric properties in La-Sr-Co-O/Pb-La-Zr-Ti-O/La-Sr-Co-O capacitors

Ramesh, R.; Dutta, B.
March 1994
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1588
Academic Journal
Examines the scaling of ferroelectric properties with the capacitor size using epitaxial heterostructures grown on silicon. Fabrication of the capacitor; Characteristics of the capacitors; Exploration of the effect of full-wafer processing; Analysis of the imprint characteristics of the 4-micro meter-diam capacitor arrays.


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