Integrated micromachined magnetic field sensor with on-chip support circuitry

Paranjape, M.; Filanovsky, I.
March 1994
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1576
Academic Journal
Presents an integrated magnetic field sensor fabricated in a standard complementary metal-oxide semiconductor process. Realization of sensor and on-chip circuitry; Increase in device sensitivity; Exhibition of higher output signal by integrated sensor; Execution of complementary metal-oxide semiconductor micromachining.


Related Articles

  • Magnetic sensor with 50μtesla resolution is cut down to small size. Ball, Richard // Electronics Weekly;1/12/2005, Issue 2176, p10 

    The article informs that a magnetometer capable of resolving down to 50microtesla has been developed by NIST, the U.S. standards institute. Based on NIST's miniature atomic clock, the magnetic sensor is built on the chip-scale, at least 100 times smaller than existing devices with similar...

  • Factors of inhomogeneous spatial response of superconducting tunnel junction detectors. Pressler, H.; Ohkubo, M.; Koike, M.; Ukibe, M.; Zama, T.; Nakamura, T.; Katagiri, M. // AIP Conference Proceedings;2002, Vol. 605 Issue 1, p19 

    Spatial uniformity in the response of superconducting tunnel junction detectors (STJ) to photons is a main concern in the development of these devices. Low Temperature Scanning Synchrotron Microscopy (LTSSM) has been used to directly image spatial profiles of the response of Nb-based STJ to...

  • The Effect of Neutron Irradiation on the Properties of n-InSb Whisker Microcrystals. Bolshakova, I. A.; Boiko, V. M.; Brudnyi, V. N.; Kamenskaya, I. V.; Kolin, N. G.; Makido, E. Yu.; Moskovets, T. A.; Merkurisov, D. I. // Semiconductors;Jul2005, Vol. 39 Issue 7, p780 

    The results of studying the effect of irradiation with fast neutrons in an IBR-2 reactor on the characteristics of magnetic-field sensors based on n+-InSb whisker microcrystals are reported (the measurements were carried out in the course of the irradiation). The optimum concentration of free...

  • Magnetically induced enhancement of reversibly responding conductometric sensors. Baker, Caitlin; Laminack, William; Tune, Travis; Gole, James // Journal of Applied Physics;2014, Vol. 115 Issue 16, p164312-1 

    Small magnetic fields are found to greatly enhance the reversible room temperature conductometric responses of n and p- type porous silicon (PS) interfaces, treated with nanostructured island sites containing paramagnetic Co(II) and Fe(II). At concentrations sufficiently low so as to avoid cross...

  • APPLICATION OF SINE REGRESSION FOR MODELLING OF HALL SENSORS. Shopov, Ventseslav; Markova, Vanya // Proceedings of the International Conference on Information Techn;2010, p213 

    A practical proof of the applicability of the sinusoidal regression in the measurement of magnetic field through the Hall sensor is given. The approach to evaluate the accuracy of modelling the dependence of the signal under measurement according to the angle of rotation of the Hall device to...

  • Magnetic sensors to take hard disks past 1Tbit/in2. Bush, Steve // Electronics Weekly;8/16/2006, Issue 2254, p1 

    The article presents results of a magnetic sensor research conducted by the Hitachi Cambridge Laboratory in partnership with the Universities of Cambridge and Nottingham in Great Britain. A magnetic sensor based on Coulomb blockade anisotropic magnetoresistance (CBAMR) has been developed....

  • Magnetoelectronics Holds Promise For Harsh Environments.  // Electronic Design;10/12/98, Vol. 46 Issue 23, p28 

    Cites the possible important applications of magnetoelectronics in the automotive market or other places where rugged, reliable sensors and memories are required. Effects of giant magnetoresistance (GMR); Measurement of how magnetic fields affect the spin of the electrons in certain materials;...

  • Status of the RELIC experiment. Gomes, M. R.; Valko, P.; Girard, T. A. // AIP Conference Proceedings;2002, Vol. 605 Issue 1, p435 

    We describe the current R&D of the RELIC detector. New results, obtained by operating the device under different magnetic field conditions are presented. These results show an improvement in the baseline operation by a factor of 2 from previous measurements.

  • Integration of a Faraday rotator and a mode selector for a magnetic field sensor. Matsuda, Kaoru; Ishizuka, Satoshi // Applied Physics Letters;8/14/1989, Vol. 55 Issue 7, p610 

    We have demonstrated an integrated magnetic field sensor consisting of a Faraday rotator and a mode selector for the first time. The sensor is a loaded waveguide which has a waveguide layer made of a garnet with magneto-optical effect for Faraday rotation and a metal clad layer for mode...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics