TITLE

Integrated micromachined magnetic field sensor with on-chip support circuitry

AUTHOR(S)
Paranjape, M.; Filanovsky, I.
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1576
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents an integrated magnetic field sensor fabricated in a standard complementary metal-oxide semiconductor process. Realization of sensor and on-chip circuitry; Increase in device sensitivity; Exhibition of higher output signal by integrated sensor; Execution of complementary metal-oxide semiconductor micromachining.
ACCESSION #
4272446

 

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