TITLE

High quality crystalline YBa[sub 2]Cu[sub 3]O[sub 7-delta] films on thin silicon substrates

AUTHOR(S)
Haakenaasen, R.; Fork, D.K.
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1573
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growth of high quality crystalline YBCO films on a thin silicon membrane by pulsed laser deposition. Implantation of boron into silicon substrates; Achievement of excellent YBCO crystallinity; Deposition of the film to the silicon substrates can be etched; Uniform thickness of silicon membrane.
ACCESSION #
4272445

 

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