TITLE

Study of mechanism to control electrical properties of AlAs grown using amine-alane with

AUTHOR(S)
Miyakoshi, Kaoru; Suemune, Ikuo
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1549
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the mechanism to control electrical properties of aluminum arsenide films grown by metalorganic molecular beam epitaxy. Critical dependence of electrical properties on the supply ratio of the precursor; Factor to control the electrical properties; Decomposition of the trimethylamine on aluminum surface.
ACCESSION #
4272437

 

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