Thermal stability of Ti/Pt/Au nonalloyed ohmic contacts on InN

Ren, F.; Abernathy, C.R.
March 1994
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1508
Academic Journal
Demonstrates a low contact resistance of nonalloyed titanium/platinum/gold metallization on n-type indium nitride. Investigation on the thermal stability of the ohmic contacts; Measurement of the low contact resistivity; Degradation of the contact morphology; Inquiry on the current transport mechanisms of metals.


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