Energy transfer from radio frequency sheath accelerated CF[sup +, sub 3] and Ar[sup +] ions to a

Kersten, H.; Snijkers, R.J.M.M.
March 1994
Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1496
Academic Journal
Examines the energy transfer from a radio frequency plasma to a silicon surface. Composition of the thermal probe substrates; Proportion of the energy flux to the ion energy and the ion flux; Description of the microscopic interaction of impinging ions in the eV range with a silicon surface.


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