TITLE

Strontium titanate thin films by rapid thermal processing

AUTHOR(S)
Joshi, P.C.; Krupanidhi, S.B.
PUB. DATE
September 1992
SOURCE
Applied Physics Letters;9/28/1992, Vol. 61 Issue 13, p1525
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication of strontium titanate thin films with perovskite structure by rapid thermal annealing treatment. Values for the measured dielectric constant and loss factor; Range of the film resistivity; Decrease leakage current density with increasing film thickness.
ACCESSION #
4272380

 

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