TITLE

Observation of growing kinetics of particles in a helium-diluted silane rf plasma

AUTHOR(S)
Watanabe, Y.; Shiratani, M.
PUB. DATE
September 1992
SOURCE
Applied Physics Letters;9/28/1992, Vol. 61 Issue 13, p1510
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growing process and particle behavior in a helium-diluted silane radio frequency (rf) plasma using laser light scattering methods. Production of the particles around the rf electrode sheath edge; Suspension of the particles by an electrostatic force; Effectiveness of gas flow for particle motion.
ACCESSION #
4272374

 

Related Articles

  • Plasma Parameter Dependence of Critical Particle Size at the Moment of Void Formation in RF Silane Plasmas. Seon, C. R.; Chai, K. B.; Choe, W.; Park, S.; Chung, C. W. // AIP Conference Proceedings;9/7/2008, Vol. 1041 Issue 1, p177 

    Although dust-free voids are frequently observed in many dusty plasmas, experiments regarding the critical particle size for the void formation have not been reported much. In this work, the dust particle size measurement at the critical moment of the void formation was performed by the...

  • Rayleigh scattering of a Gaussian laser beam from expanding clusters. Kumar, Manoj; Tripathi, V. K. // Physics of Plasmas;Dec2009, Vol. 16 Issue 12, p123111 

    Rayleigh scattering of an intense laser with Gaussian temporal and radial profiles from clustered gases is examined. The laser quickly converts the clusters into plasma balls with electron cloud of each ball executing large excursions about the ion sphere. The laser also heats the electrons. As...

  • Light Scattering Measurements with Dust of Interest for IMPF/IMPACT. Hadamcik, Edith; Renard, Jean-Baptiste; Boufendi, Laïfa; Cernogora, Guy; Levasseur-Regourd, Anny-Chantal; Szopa, Cyril; Jouanny, Marie C.; Leroi, V. // AIP Conference Proceedings;2005, Vol. 799 Issue 1, p271 

    Light scattering can be used to characterise the physical properties of solid particles (size, refractive index) in dusty plasmas. In the present study, we have collected the dust made in one Argon-silane RF plasma and two Nitrogen-methane RF plasmas. We present polarimetric phase curves of the...

  • Formation processes of nanometer sized particles in low pressure Ar/CH4 rf plasmas. Beckers, J.; Vacaresse, G. D. G. J.; Stoffels, W. W. // AIP Conference Proceedings;9/7/2008, Vol. 1041 Issue 1, p163 

    In this paper, formation and growth processes of nanometer and micrometer sized dust particles in low pressure Ar/CH4 rf (13.56 MHz) plasmas are investigated as function of temperature in the range 25–100 °C. During experiments the pressure was typically 0.8 mbar and the forward power...

  • Electron Temperature and Density Variation Due To Temporal Evolution of Nano Particle Growth in RF Silane Plasma. Chai, K. B.; Seon, C. R.; Choe, W.; Park, S.; Chung, C. W. // AIP Conference Proceedings;9/7/2008, Vol. 1041 Issue 1, p175 

    Nano particles, generated in various processing plasmas, have been extensively studied for applications in the fabrication of microelectronics devices. However, studies to find the relation between the particle parameters (particle size and density) and the plasma parameters (electron...

  • A topological approach to the problem of charged particle trajectories in a toroidal... Doloc, C. M.; Martin, G. // Physics of Plasmas;Oct95, Vol. 2 Issue 10, p3655 

    Proposes a method for solving the general problem of Charged Particle Orbits in an axisymmetric toroidal configuration. Classification of the toroidal properties of the trajectories; Confinement of the energetic orbits into the plasma; Application of the method to charged fusion products and...

  • Computer experiments on dynamical cloud and space time fluctuations in one-dimensional meta... Rouet, J.L.; Feix, M.R. // Physics of Plasmas;Jul96, Vol. 3 Issue 7, p2538 

    Focuses on the test particle picture that is a central theory of weakly correlated plasma. Importance of the extension of the theory to meta-equilibrium distributions; General dynamical Debye cloud for any test particle velocity; Simulations of a one-dimensional two-component plasma.

  • A fully kinetic, self-consistent particle simulation model of the collisionless plasma—sheath region. Procassini, R. J.; Birdsall, C. K.; Morse, E. C. // Physics of Fluids B: Plasma Physics;Dec90, Vol. 2 Issue 12, p3191 

    A fully kinetic particle-in-cell (PIC) model is used to self-consistently determine the steady-state potential profile in a collisionless plasma that contacts a floating, absorbing boundary. To balance the flow of particles to the wall, a distributed source region is used to inject particles...

  • Vacuum—plasma boundary helicity injection. Barrow, B. J.; Goldenbaum, G. C. // Physics of Fluids B: Plasma Physics;Aug92, Vol. 4 Issue 8, p2577 

    The magnetic helicity inside a volume enclosed by a conducting boundary with electrodes inserted through insulator gaps has been measured. By comparing the measured time dependence of the helicity with predictions of a numerical simulation and analytic theory, the importance of the insulator...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics