Observation of growing kinetics of particles in a helium-diluted silane rf plasma

Watanabe, Y.; Shiratani, M.
September 1992
Applied Physics Letters;9/28/1992, Vol. 61 Issue 13, p1510
Academic Journal
Examines the growing process and particle behavior in a helium-diluted silane radio frequency (rf) plasma using laser light scattering methods. Production of the particles around the rf electrode sheath edge; Suspension of the particles by an electrostatic force; Effectiveness of gas flow for particle motion.


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