A 100 kV 10 A high-voltage pulse generator for plasma immersion ion implantation

Brufscher, Jorg
July 1996
Review of Scientific Instruments;Jul96, Vol. 67 Issue 7, p2621
Academic Journal
Presents the design of a high-voltage pulsing system for a plasma immersion ion implantation (PIII) facility. Electrical model for the plasma; Design of a pulse generator using a tetrode; Performance measurements.


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