TITLE

A 100 kV 10 A high-voltage pulse generator for plasma immersion ion implantation

AUTHOR(S)
Brufscher, Jorg
PUB. DATE
July 1996
SOURCE
Review of Scientific Instruments;Jul96, Vol. 67 Issue 7, p2621
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the design of a high-voltage pulsing system for a plasma immersion ion implantation (PIII) facility. Electrical model for the plasma; Design of a pulse generator using a tetrode; Performance measurements.
ACCESSION #
4271725

 

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