TITLE

Design and performance of a new spectroscopic photon emission microscope system for the physical

AUTHOR(S)
Chan, D.S.H.; Phang, J.C.H.; Chim, W.K.; Liu, Y.Y.; Tao, J.M.
PUB. DATE
July 1996
SOURCE
Review of Scientific Instruments;Jul96, Vol. 67 Issue 7, p2576
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the design and performance of a spectroscopic photon emission microscope system with panchromatic imaging and continuous wavelength spectroscopic capabilities. Detection of very low levels of light emissions from biased devices; Potential use of the 'defect fingerprinting' technique.
ACCESSION #
4271716

 

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