TITLE

Absolute angular positioning in ultrahigh vacuum

AUTHOR(S)
Schief, Hansjorg; Marsico, Vittorio; Kern, Klaus
PUB. DATE
May 1996
SOURCE
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p2026
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Discusses the modification and adaptation of commercially available angular resolvers, routinely used in machine tools and robotics, to be used under ultrahigh-vacuum. Electro-optical position measuring technique; Mechanical design; Scattering geometry of the high-resolution helium-reflectivity measurements.
ACCESSION #
4271685

 

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