TITLE

Stress determination of micromembranes using laser vibrometry

AUTHOR(S)
Biswas, Abhijit; Weller, Tom; Katehi, Linda P.B.
PUB. DATE
May 1996
SOURCE
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p1965
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on a laser vibrometry based dynamic technique for biaxial residual stress determination in micromembranes. Type of micromembrane examined; Displacement spectrum of a large membrane sample; Arrangement used to perform the vibrational analysis of the membranes; Evolution of stress as a function of thermal cycles.
ACCESSION #
4271671

 

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