TITLE

Real time monitoring of the growth of transparent thin films by spectroscopic ellipsometry

AUTHOR(S)
Kildemo, M.; Drevillon, B.
PUB. DATE
May 1996
SOURCE
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p1956
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents real time monitoring of the growth of plasma deposited transparent thin films by spectroscopic phase modulated ellipsometry. Theoretical background; Inversion method; Least square fitting.
ACCESSION #
4271669

 

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