Polarization modulated transmission spectro-ellipsometry

Fukazawa, Tomoyuki; Fujita, Yasuhiko
May 1996
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p1951
Academic Journal
Reports on the installation of a compensator adjacent to the photolestaic modulator for the purpose of canceling out the residual birefringence caused by optical elements that precede the compensator in the polarization-modulated ellipsometer. Principle of the technique; Base line; Dichroic polarizer; Amorphous poly-olefin film; Liquid crystal.


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