TITLE

Polarization modulated transmission spectro-ellipsometry

AUTHOR(S)
Fukazawa, Tomoyuki; Fujita, Yasuhiko
PUB. DATE
May 1996
SOURCE
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p1951
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the installation of a compensator adjacent to the photolestaic modulator for the purpose of canceling out the residual birefringence caused by optical elements that precede the compensator in the polarization-modulated ellipsometer. Principle of the technique; Base line; Dichroic polarizer; Amorphous poly-olefin film; Liquid crystal.
ACCESSION #
4271668

 

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