TITLE

Piezoelectrically driven rotary stage for use in ultrahigh vacuum

AUTHOR(S)
de Haas, E.; Barsingerhorn, W.; van der Veen, J.F.
PUB. DATE
May 1996
SOURCE
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p1930
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of a compact high-precision piezoelectrically driven rotary stage for use in ultrahigh vacuum. Principle of operation; Catching element; Rotary stage; Performance.
ACCESSION #
4271663

 

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