TITLE

A radio frequency compensated emissive probe

AUTHOR(S)
Jungwon Kang; Carlile, Robert N.; O'Hanlon, John F.
PUB. DATE
May 1996
SOURCE
Review of Scientific Instruments;May96, Vol. 67 Issue 5, p1818
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Discusses a technique for using an emissive probe to measure accurately the time-invariant plasma potential in a radio frequency generated plasma, usually used in plasma processing. Equivalent circuits and theory of operation; Emissive probe system design; Function of the resonant LC circuit; Conditions in order for the inflection point method to be accurate.
ACCESSION #
4271644

 

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