Selective trilayer deposition process for fabricating Nb/Al-AlO[sub x]/Nb Josephson tunnel

Monaco, R.; Oliva, A.
May 1994
Applied Physics Letters;5/30/1994, Vol. 64 Issue 22, p3042
Academic Journal
Examines the selective trilayer deposition process for fabricating Nb/Al-AlO[sub x]/Nb Josephson tunnel junctions. Formation of the junction on a patterned Nb underlayer; Provision of underlayer and wiring layer insulation by anodization; Assessment of the current-voltage characteristics of a single junction.


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