TITLE

Growth of InSb using tris(dimethylamino)antimony and trimethylindium

AUTHOR(S)
Baucom, K.C.; Biefeld, R.M.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/30/1994, Vol. 64 Issue 22, p3021
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growth of InSb using tris(dimethylamino)antimony and trimethylindium (TMIn). Development of epitaxial InSb layers on p[sup -]-InSb substrates by metalorganic chemical vapor deposition; Evaluation of growth temperature and pressures; Proportionality of the growth rate to the TMIn flow at all temperatures.
ACCESSION #
4266652

 

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