A new approach for synthesizing Ge quantum crystallites embedded in a-SiN[sub x] films

Qu, X.X.; Chen, K.-J.
March 1994
Applied Physics Letters;3/28/1994, Vol. 64 Issue 13, p1656
Academic Journal
Describes an approach for synthesizing germanium (Ge) quantum crystallites embedded in a-SiN[sub x] films. Preparation of thin films with Ge clusters using the plasma enhanced chemical vapor deposition method; Production of Ge microcrystals with optimized deposition conditions; Correlation between Raman peaks and the quantum crystallites.


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