TITLE

Electron acceleration resonant with sheath motion in a low-pressure radio frequency discharge

AUTHOR(S)
Okuno, Yoshihiro; Ohtsu, Yasunori
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/28/1994, Vol. 64 Issue 13, p1623
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Proposes an electron acceleration method in a low-pressure radio frequency (rf) discharge. Achievement of electron acceleration by multiple interactions with sheath motion; Usefulness of the method for low-pressure high density rf plasma generation; Influence of the driving frequency on electron acceleration.
ACCESSION #
4266583

 

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